1. Data Loading and Preprocessing
1.1 Edge Data
1.2 Surface Data
1.3 Calibration Wafer Data
2. Surface Area Distribution Analysis

PCL and Slope Statistics for Surface Analysis
| 8 |
-1.448641 |
8.027225 |
347704.0 |
| 9 |
-1.639517 |
8.699482 |
202359.9 |
| 10 |
-1.757251 |
8.866243 |
111050.4 |
| 11 |
-1.507035 |
8.699415 |
592291.9 |

3. Edge Area Distribution Analysis

Edge Analysis Summary Statistics
| 8 |
1907.522 |
-1.268025 |
| 9 |
3421.684 |
-1.093597 |
| 10 |
1053.960 |
-1.346254 |
| 11 |
5967.575 |
-1.170695 |

4. Calibration Wafer Analysis

Calibration Wafer Analysis Summary Statistics
| 8 |
-1.113951 |
4.769601 |
19129.149 |
| 9 |
-1.271722 |
4.335570 |
2565.729 |
| 10 |
-1.167449 |
4.572796 |
8258.749 |
| 11 |
-1.401759 |
5.082022 |
4221.427 |

5. Edge Model Analysis

Edge Model Analysis Summary Statistics
| 8 |
41789.01 |
-0.9867673 |
| 9 |
29208.41 |
-1.1271862 |
| 10 |
24510.60 |
-1.1711300 |
| 11 |
161238.19 |
-1.0123935 |
