1. Data Loading and Preprocessing

1.1 Edge Data

1.2 Surface Data

1.3 Calibration Wafer Data

2. Surface Area Distribution Analysis

PCL and Slope Statistics for Surface Analysis
Trial slope intercept PCL
8 -1.448641 8.027225 347704.0
9 -1.639517 8.699482 202359.9
10 -1.757251 8.866243 111050.4
11 -1.507035 8.699415 592291.9

3. Edge Area Distribution Analysis

Edge Analysis Summary Statistics
Trial PCL slope
8 1907.522 -1.268025
9 3421.684 -1.093597
10 1053.960 -1.346254
11 5967.575 -1.170695

4. Calibration Wafer Analysis

Calibration Wafer Analysis Summary Statistics
Trial slope intercept PCL
8 -1.113951 4.769601 19129.149
9 -1.271722 4.335570 2565.729
10 -1.167449 4.572796 8258.749
11 -1.401759 5.082022 4221.427

5. Edge Model Analysis

Edge Model Analysis Summary Statistics
Trial PCL slope
8 41789.01 -0.9867673
9 29208.41 -1.1271862
10 24510.60 -1.1711300
11 161238.19 -1.0123935

6. Combined Analysis and Comparison

Statistical Summary of Model Comparisons
Area Observed_by_Modeled Observed_by_Calibration Modeled_by_Calibration Ratio
Min. : 1.00 Min. :0.00571 Min. :0.2500 Min. : 2.296 Min. :0.00629
1st Qu.: 11.87 1st Qu.:0.05651 1st Qu.:0.3258 1st Qu.: 3.743 1st Qu.:0.02167
Median : 140.92 Median :0.09092 Median :0.3504 Median : 5.823 Median :0.07467
Mean : 2039.11 Mean :0.10080 Mean :0.4003 Mean : 7.926 Mean :0.17896
3rd Qu.: 1672.63 3rd Qu.:0.14290 3rd Qu.:0.4105 3rd Qu.: 6.991 3rd Qu.:0.25724
Max. :19850.65 Max. :0.21443 Max. :0.7571 Max. :40.083 Max. :0.88623
NA NA’s :70 NA’s :70 NA’s :30 NA